#异或和是质数的子集数01背包   f(前i个数 异或和是j)

# M > j ^ A[i - 1] 时才选 A[i - 1] 
#滚动数组 后面加 & 1  

#最后判断j 是不是质数
M = 2**13
MOD = 1e9 + 7

def is_prime(x):
    for i in range(2, x):
        if x % i == 0:
            return False
    return True

if __name__ == '__main__':
    n = int(input())
    A = list(map(int, input().split()))
    dp = [[0] * M for _ in range(2)]
    dp[0][0] = 1

    for i in range(1, n + 1):
        for j in range(M):
            dp[i & 1][j] = dp[i - 1 & 1][j]
            if M > j ^ A[i - 1]:
                dp[i & 1][j] = (dp[i & 1][j] + dp[i - 1 & 1][j ^ A[i - 1]]) % MOD

    res = 0
    for j in range(2, M):
        if is_prime(j):
            res = (res + dp[n & 1][j]) % MOD

    print(int(res))